The ACU20PH series comes standard with a piezoelectric diaphragm‑type pressure sensor and a digital circuit board, delivering high‑accuracy, stable, and reliable pressure measurement and control. This basic digital PC board incorporates all the essential functions required for measurement and control. In addition to the standard RS485 output signal, the ACU20PH also offers analog I/O signals.

Overview
Applications
Specifications
Dimensions
Software
The ACU20PH series high‑temperature pressure controllers/pressure gauges feature a split‑type design, with measurement ranges from 100 kPa to 10 MPa (available in both absolute and gauge pressure). In addition, differential pressure transmitters are also offered. This series delivers high accuracy and excellent repeatability, and is available in two configurations: upstream pressure control and downstream pressure control.
The ACU20PH series comes standard with a piezoelectric diaphragm‑type pressure sensor and a digital circuit board, delivering high‑accuracy, stable, and reliable pressure measurement and control. This basic digital PC board incorporates all the essential functions required for measurement and control. In addition to the standard RS485 output signal, the ACU20PH also offers analog I/O signals.
The ACU20PH high‑temperature pressure controller/pressure gauge employs a proportional solenoid valve. It delivers exceptionally fast and smooth control, and we offer a range of control valves tailored to specific application areas. Standard direct‑acting valves are used for general applications, while pilot‑operated valves are recommended for high‑flow‑rate applications.
Application areas: semiconductor manufacturing, gas-phase and liquid-phase chromatography, vapor pressure control in MOCVD processes, gas-pressure protection control during extrusion molding, and pressure control in autoclaves/reactors, among others.
| Series | ACU20PH | |||||
| Model number | LC | LM | MC | MM | BC | BM |
| Preheating time | Negligible | |||||
| Accuracy | ±0.5%F.S | |||||
| Repeatability | ≤0.1% | |||||
| Working differential pressure | 0.05–0.5 MPa (customizable upon request) | |||||
| Sensor response time | 0.2s | |||||
| Range ratio | 20:1 | 50:1 | 20:1 | 50:1 | 20:1 | 50:1 |
| Control stability | ≤±0.05%F.S (Measurement conditions: 1 L/min N2) | |||||
| Analog quantity | 0–5 V, 4–20 mA | |||||
| Digital quantity | RS232/485, MODBUS protocol | |||||
| Power supply | 24VDC | |||||
| Operating temperature | 0~+250℃ | |||||
| Temperature sensitivity | 0.1%FS/°C | |||||
| Directional Influence (90° Change) | <0.03 kPa (absolute pressure / gauge pressure sensor) | |||||
| <0.6 kPa (differential pressure sensor) | ||||||
| Electrical connection | DB9 port | |||||
| Protection rating | IP40, IP65 (customizable) | |||||
| Leak rate | 1×10-9 Pa·m³/s | |||||
| Valve | Valve normally closed | / | Valve normally closed | / | Valve normally closed | / |
| Base material | Stainless steel | |||||
| Sealing material | Fluororubber, nitrile rubber, EPDM, perfluoroether | |||||
| Body thread | G3/8 internal thread | G1/2 internal thread | ||||
| Joint | Ferrules, ferrule fittings, quick-connect couplings, VCR fittings, flanges, and more | |||||
Mass Flow Measurement and Control System V5.0