The ACU10FCH series high-temperature mass flow meters enable rapid and accurate measurement of volumetric and mass flow rates for gases, liquids, and steam. The ACU10FCH series high-temperature mass flow controllers utilize a custom-designed high-speed proportional control valve to achieve precise regulation of volumetric and mass flow rates for gases, liquids, and steam.

Overview
Applications
Specifications
Dimensions
High-Temp Steam
Software
◆Capable of rapidly and accurately measuring the volumetric and mass flow rates of process gases, liquids, and vapors.
◆ A custom-designed high-speed proportional control valve is used to precisely regulate the medium’s volumetric flow rate and mass flow rate.
◆ When measuring liquids, the uniquely designed vent hole allows air to be easily expelled.
◆ Integrated multifunction digital display, enabling users to control setpoints and PID valve adjustments directly via on-screen buttons, while also providing analog I/O and RS‑485 digital communication.
◆ No internal moving parts or heating elements; passes vibration testing and is insensitive to installation orientation.
◆ Utilizing an internally compensated laminar flow differential pressure technology, the fluid maintains laminar flow even across a wide range of flow rates.
◆We provide comprehensive user support, including technical consulting, prompt equipment calibration services, and a conditional lifetime warranty.
The ACU10FCH series high-temperature mass flow meters/controllers are widely used across various industries, including process manufacturing, food analysis, and analytical testing and metrology.
Multivariable measurement and a 50:1 adjustable span ratio enable a single ACU10FCH high‑temperature mass flow meter/controller to replace the functionality of multiple devices. With 1% accuracy, 1% repeatability, and a control response time of less than 200 milliseconds, it ensures reliable operation for process gases, liquids, and vapors.
| Series | ACU10FCH | |||||
| Model number | LC | LM | MC | MM | British Columbia | BM |
| Range of measurement | Gas: 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM | Gas: 0–(30, 40, 50…300) SLM | Gas: 0–(300, 400, 500…3000) SLM | |||
| Liquid: 0–(2, 5, 10… 500) SCCM | Liquid: 0–(500, 600…1000) SCCM, 0–(1, 2, 3…10) SLM | Liquid: 0–(10, 15...20) SLM | ||||
| Steam: 0–(2, 5, 10…1000) SCCM, 0–(1, 2, 3…10) SLM | 0-(10,20,30...100)SLM | 0–(100, 150, 200...500) SLM | ||||
| Accuracy | ±1.0%F.S | |||||
| Repeatability | ±1%F.S | |||||
| Zero Drift & Full-Scale Drift | 0.02% F.S/ °C/Atm | |||||
| Working differential pressure | 0.1–0.5 MPa (to be specified at the time of order) | |||||
| Range ratio | 50:1 | 100:1 | 50:1 | 100:1 | 50:1 | 100:1 |
| Typical response time | 200 milliseconds (adjustable) | |||||
| Analog quantity | 0–5 V, 4–20 mA | |||||
| Digital quantity | RS232/485, MODBUS protocol | |||||
| Power supply | 24VDC | |||||
| Operating temperature | 80~350℃ (customizable) | |||||
| Operating pressure drop | <0.01 MPa | |||||
| Work stress | <1 MPa | |||||
| Electrical connection | DB15 port | |||||
| Protection rating | IP40 | |||||
| Leak rate | 1×10 -9 Pa m³/S | |||||
| Valve | Valve normally closed | / | Valve normally closed | / | Valve normally closed | / |
| Base material | Stainless steel | |||||
| Sealing material | Fluororubber, nitrile rubber, EPDM, perfluoroether | |||||
| Body thread | G3/8 internal thread | G1/2 internal thread | ||||
| Joint | Ferrules, ferrule fittings, quick-connect couplings, VCR fittings, flanges, etc. | |||||
When the measured medium and flow rate differ, the product’s appearance and dimensions may vary. For example, the figure below shows a medium-range high-temperature steam flow controller; please consult us based on your specific operating conditions.

(High-Temperature Steam Flow Controller)
Mass Flow Measurement and Control System V5.0