ACU20FDH Series

The ACU20FDH series high-temperature thermal mass flow controllers feature a custom-designed high-speed proportional control valve, enabling rapid and precise measurement of the volumetric and mass flow rates of high-temperature gases and steam, with an accuracy of 0.5%.

Range: 0-300SLM

Datasheet (PDF) 585 KB

Category: Gas Flow

Overview

Applications

Specifications

Dimensions

Software

◆Capable of rapidly and accurately measuring the volumetric and mass flow rates of high-temperature gases and steam.

◆ A custom-designed high-speed proportional control valve is used to precisely regulate the medium’s volumetric flow rate and mass flow rate.

◆ Extra-large touch display, offering convenient operation while supporting both analog I/O and RS‑485 digital communication.

◆ No internal moving parts or heating elements; passes vibration testing and is insensitive to installation orientation.

◆ Utilizing an internally compensated laminar flow differential pressure technology, the fluid maintains laminar flow even across a wide range of flow rates.

◆We provide comprehensive user support, including technical consulting, prompt equipment calibration services, and a conditional lifetime warranty.

The ACU20FDH series high-temperature mass flow meters/controllers are widely used across various industries, including process manufacturing, food analysis, analytical testing, and metrology.

Multivariable measurement and a 50:1 adjustable span ratio enable a single ACU20FDH mass flow meter and controller to replace the functionality of multiple devices. With an accuracy of 0.5%, repeatability of 0.2%, and a control response time of less than 200 milliseconds, it ensures reliable operation for process gases and steam.

Series	ACU20FDH
Model number	LC	LM	MC	MM	BC	BM
Range of measurement	Gas: 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM		Gas: 0–(30, 40, 50…300) SLM		Gas: 0–(300, 400, 500…3000) SLM
	Steam: 0–(2, 5, 10…1000) SCCM, 0–(1, 2, 3…10) SLM		0-（10,20,30...100)SLM		0–(100, 150, 200...500) SLM
Accuracy	0.5%F·S
Repeatability	±0.2%F·S
Zero Drift & Full-Scale Drift	0.02% F.S/ °C/Atm
Working differential pressure	0.1–0.5 MPa (to be specified at the time of order)
Range ratio	50:1	100:1	50:1	100:1	50:1	100:1
Typical response time	200 milliseconds (adjustable)
Analog quantity	0–5 V, 4–20 mA
Digital quantity	RS232/485, MODBUS protocol
Power supply	24VDC
Maximum working pressure	1MPa
Electrical connection	DB9 port
Protection rating	IP40
Leak rate	1×10 ^-9 Pa m³/S
Valve	Valve normally closed	/	Valve normally closed	/	Valve normally closed	/
Base material	Stainless steel
Sealing material	Fluororubber, nitrile rubber, EPDM, perfluoroether
Body thread	G3/8 internal thread				G1/2 internal thread
Joint	Ferrules, ferrule fittings, quick-connect couplings, VCR fittings, flanges, etc.