The ACU30FC is a high-precision, differential-pressure‑based flow controller/flowmeter. With a compact footprint yet a large display, it offers enhanced convenience and user-friendliness. This series employs a differential-pressure mass‑measurement principle that exhibits no thermal drift and zero response lag, enabling simultaneous display and output of instantaneous flow, cumulative flow, pressure, temperature, and other parameters.
Range: 0-300SLM

Overview
Applications
Specifications
Dimensions
Software
◆ No “specific heat capacity” error; high-precision data with real-time feedback.
◆ Compact design, with a large screen for a more intuitive experience.
◆ Supports multi-parameter measurement, facilitating data analysis. Employs a DSP-based controller to further enhance accuracy and reliability.
◆ Nearly a hundred gases can be switched freely, with no need to return the instrument to the factory for calibration.
◆ Supports USB Type-C and Bluetooth, offering flexible and versatile device connectivity.
The ACU30FC series flow meters operate on the differential pressure principle, calculating flow rate by measuring the pressure drop across a throttling element. The device features built-in PID control and, when paired with an electromagnetic proportional control valve, enables precise flow regulation. The ACU30FC can simultaneously measure multiple parameters, including gas mass flow, volumetric flow, pressure, and temperature, and transmits these data via RS‑485 or RS‑232 interfaces to a touch screen, external devices, or a control system for real-time monitoring and analysis.
| Vacuum | Coating | Solar energy | Various instrumental analyses |
| Petroleum and Petrochemicals | Gas production and gas distribution | Environmental protection | Semiconductor |
| Series | ACU30FC | |||||
| Model number | SC | SM | LC | LM | MC | MM |
| Range of measurement | 0–(2, 5, 10…1000) SCCM, 0–(1, 5, 10…30) SLM | 0-(30,40,50...300)SLM | ||||
| Accuracy | ±0.5%F.S | |||||
| Repeatability | ±0.2%F.S | |||||
| Linear | ±0.25%F.S | |||||
| Working differential pressure | 0.1–0.5 MPa (to be specified at the time of order) | |||||
| Range ratio | 50:1 | 100:1 | 50:1 | 100:1 | 50:1 | 100:1 |
| Typical response time | 50 milliseconds (adjustable) | |||||
| Analog quantity | 0–5 V, 4–20 mA | |||||
| Digital quantity | RS232/485, MODBUS protocol | |||||
| Power supply | 24VDC | |||||
| Communication protocol | Modbus, DeviceNet, Profinet, EtherCAT, Profibus, and others | |||||
| Operating temperature | 0~60℃ | |||||
| Maximum working pressure | 1MPa | |||||
| Electrical connection | DB9 port | |||||
| Installation location | Horizontal installation | |||||
| Protection rating | IP40 | |||||
| Leak rate | 1×10-9 Pa·m³/s | |||||
| Valve | Valve normally closed | / | Valve normally closed | / | Valve normally closed | / |
| Base material | Stainless steel | |||||
| Sealing material | Fluororubber, nitrile rubber, EPDM, perfluoroether | |||||
| Body thread | G3/8 internal thread | |||||
| Joint | Ferrules, ferrule fittings, quick-connect couplings, VCR fittings, flanges, etc. | |||||
Mass Flow Measurement and Control System V5.0